November 6-10

Workshops

The following half-day workshops will take place on Monday 6 November:

(1) Linking theory & experiment
(2) Linking academia & industry
(3) Practical challenges for industry
(4) Scientific Paper Writing Workshop, led by Dr. Bodil Holst*, Professor, Head of Nanophysics Group, University of Bergen. This will be a 3.5-hour morning workshop, starting at 9am, plus or minus 30 minutes.

The Scientific Paper Writing Workshop has two main goals. Firstly, to provide the participants with a set of “tools” helping them to present their scientific results in a clear and interesting way and, secondly, to make them aware of various strategic issues connected to paper writing (in which journal to publish, cover letter to the editor, etc.). The workshop is presented in English. The participants are encouraged to bring drafts of own papers, in particular an abstract for at least one paper, but this is not a prerequisite.

 

Workshops #1-3 have no cost to the attendees, but pre-registration is required. The cost of Workshop #4 is $50, payable upon GEC2017 registration.

*Please consider buying her book Scientific Paper Writing - A Survival Guide, illustrated by Jorge Cham from PhD comics.
https://www.amazon.com/Scientific-Paper-Writing-Survival-Guide-ebook/dp/B019ZI93XM

Dr. Bodil Holst
Professor, Head of Nanophysics Group
University of Bergen, Department of Physics and Technology
Allegaten 55
5007 Bergen, Norway
Fax. +47 55 58 94 40”

 

Monday Workshops

Download as a PDF

Session AM1 (9-12:30): Scientific paper writing workshop:
Professional writing coach outlines successful strategies for journal manuscripts, reports, review papers.

Session AM2 (2-5:30): Linking theory and experiment:
Model validation by experiments. Combining diagnostic data with simulation and modeling for more confident understanding of processes.

Session BM1 (9-12:30): Linking academia and industry:
Characterization and diagnosis of plasma under manufacturing conditions. Lessons learned in navigating industry-supported research in academia.

Session BM2 (2-5:30): Practical challenges for industry:
Use of sensors with artificial intelligence; challenges in processing, atomic layer deposition, HiPIMS, processing, etching.

Scientific-Paper Writing Workshop

This new workshop theme, led by Dr. Bodil Holst, Professor, Head of Nanophysics Group, University of Bergen, will start at 9am, last 3.5 hours, and involve contributing and examining writing samples. Enrollment costs $50 per person.

The Scientific Paper Writing Workshop has two main goals. Firstly, to provide the participants with a set of “tools” helping them to present their scientific results in a clear and interesting way and, secondly, to make them aware of various strategic issues connected to paper writing (in which journal to publish, cover letter to the editor, etc.). The workshop is presented in English. The participants are encouraged to bring drafts of own papers, in particular an abstract for at least one paper, but this is not a prerequisite.

She is the author of the book “Scientific Paper Writing - A Survival Guide”, illustrated by Jorge Cham from PhD comics. 
https://www.amazon.com/Scientific-Paper-Writing-Survival-Guide-ebook/dp/B019ZI93XM

 

Linking Theory and Experiment Workshop

Modeling of industrial plasma tools and applications: experimental validation
Shahid Rauf, Applied Materials, Inc

Validation of Computation by Experiment for the VSim and USim Codes
John Cary, University of Colorado, Boulder and Tech-X Corporation

Combining advanced optical diagnostics and simulations to reveal chemical kinetics in atmospheric pressure plasmas
Sandra Schroeter, University of York

Linking experimental measurements and numerical simulations to understand plasma-surface interaction processes
Andrew Gibson, University of York

The effects of elementary surface processes on the plasma parameters in capacitively coupled radiofrequency discharges
Aranka Derzsi, West Virginia University

 Sputtering process data interpreted by heavy particle simulations
Jan Trieschmann, RUB

 

Linking Academia and Industry Workshop

There is a high demand for collaborations between academia and industry that apply fundamental scientific understanding and state-of-the-art plasma diagnostics to practical problems that cannot be solved empirically. This workshop aims at identifying potential topics of partnerships between industry and academia as well as problems that limit their foundation. Selected examples of successful collaborations will be presented.

One of several examples is the field of process control: Typically academia aims at developing complicated self-consistent and slow models that provide a detailed understanding of fundamental effects, while the industry requires more simplified quick models for real-time process control, that do not have to be self-consistent.

Meanwhile, industry often does not characterize plasmas sufficiently via complementary diagnostics to provide a basis for the unique identification of problems, that limit process control, and for their solution based on scientific understanding of the plasma physics. Clearly, the combination of the complementary expertise of academia and industry is required to move forward

Characterization and diagnostics of RF plasmas under manufacturing conditions    Michael Klick, Plasmetrex GmbH,
Progress on Voltage Waveform Tailoring for plasmas: From science to process, from lab to fab
Erik Johnson, LPICM-CNRS, Ecole Polytechnique, University Paris-Saclay

The status of etching processes in semiconductor fabrication, and upcoming challenges
Jin-Young Bang, Samsung Electronics

Successes, failures, and lessons learned navigating industry-supported research in academia
Steven Shannon, North Carolina State University

Application perspective of plasma science and technology for food and agriculture
Wonho Choe, Korea Advanced Institute of Science & Technology

The application of the multipole resonance probe to industrially relevant processes  Moritz Oberberg, Bochum University

 

Practical Challenges for Industry Workshop

Use of plasma sensors combined with artificial intelligence in the diagnostics and monitoring of plasma processes
Mike Hopkins, Impedans

The significance of RF power delivery for thin-film semiconductor plasma processes and the enhancements of innovative solutions
David Comou, MKS Instruments, Inc

Plasma etch reactor design challenges for high RF power applications
Alexei Marakhtanov, Lam

Atomic Layer Processing of Silicon Dielectrics: Precursors, Processes, and Plasmas
David C Smith, Lam Research Corporation

Practical challenges for HiPIMS
Sean Armstrong, K. J. Lesker Company

 Practical challenges for atomic layer deposition and the design of PVD tools         
J. R. Gaines, K. J. Lesker Company